STI

C.C.S.S

반도체와 디스플레이 및 IT 산업 분야에 필요한 다양한 Chemical을
공급배관을 통해 생산 장비로 원격 공급하는 자동화 장비 브로셔다운로드

• Central Chemical Supply System
• Slurry Mixing & Supply System
• Chemical Mixing / Dilution System

Applications

- LSC, Oxide, Tungsten, Copper, Poly, Ceria
- Dilution with DI and mixing with other chemicals
- Vessel type (low flow rate) / Tank type (high flow rate)
- Automation for slurry filter change system

Features

- Easy to operate with touch screen
- Automatic/semi-automatic/manual mode with PLC
- Optimal design by 3D CAD for easy maintenance
- Deposition-free piping design
- Auto flushing to avoid precipitation in the pipelines and tanks
- Flow control with 3 vessels (supply, stand-by, and return)
- Wet conditions maintained by humid N2 (RH > 90%)
- pH, density, flow rate, and pressure closely monitored
- Warranty covers preventive maintenance service every 6 months
- ISO 9001 and ISO 14001 certified