WET System
TFT,C/F 패널용 Glass에 Color Pattern을 현상하는 장비(Developer),
세정 장비(Cleaner) 및 식각 장비(Glass Etching / Slimming) 제품군으로 구성
브로셔다운로드
세정 장비(Cleaner) 및 식각 장비(Glass Etching / Slimming) 제품군으로 구성
브로셔다운로드
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- Cleaner (Initial, Pre-Depo, Pre Photo, ITO)
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Basic Specifications
- EUV, AQJ, Shower nozzles, Aqua knife, Air knife
- Single & Double roll brush
- Megasonic line shower (Option) -
Application
- Cleaning the glass surface of TFT and Color Filter
- Up to G10.5 - 제품문의 z1c202@sti.co.kr
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- Cassette Cleaner
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Basic Specifications
- Special wind jet nozzle (cleaning & drying)
- Drying method : In-line type or hot blower type
- Cassette rotation process
- Chamber type : one chamber, two chambers, three chambers -
Application
- Cleaning the glass surface of TFT and Color Filter
- Up to G10.5 - 제품문의 z1c202@sti.co.kr
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- Developer
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Basic Specifications
- Slit type for TFT and Oscillation for Color Filter
- Shower nozzles, Aqua knife, Air knife, HPWJ, IR Knife
- Magnetic transfer/Partial tilting transfer
- Recycle system of the developing chemical
- Temp control of developing chemical < ±0.5℃
- Automatic flow control -
Application
- Cleaning the glass surface of TFT and Color Filter
- Up to G10.5 - 제품문의 z1c202@sti.co.kr
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- Glass Slimming System
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Basic Specifications
- 1.4t → 0.8-0.4t
- Good uniformity < 3%
- Micro bubble system
- Patent : Korea, Japan, Taiwan -
Application
- Developing the glass surface of photo mask
- Up to G10.5 - 제품문의 z1c202@sti.co.kr
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- Stripper
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Basic Specifications
- High pressure shower nozzles, Mega sonic, Aqua knife, Air knife
- Magnetic transfer/Partial tilting transfer -
Application
- Removing of photo resist
- Up to G6.0 - 제품문의 z1c202@sti.co.kr
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- Etcher
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Basic Specifications
- Oscillation shower nozzles, Aqua knife, Air knife
- Magnetic transfer/Partial tilting transfer -
Application
- Patterning of metal layer (ITO, Moly, Al, Cu)
- Up to G10.5 - 제품문의 z1c202@sti.co.kr
- Cleaner after glass grinding
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Basic Specifications
- Shower nozzle, Dual air knife
- Magnetic transfer/Partial tilting transfer -
Application
- Cleaning of glass particle after glass grinding
- Mobile size to TV size - 제품문의 z1c202@sti.co.kr
- Photo Mask Developer
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Basic Specifications
- Shower nozzle, Dual air knife
- Capable of multi mask size -
Application
- Developing the glass surface of photo mask
- Up to G6.0 - 제품문의 z1c202@sti.co.kr